Axcelis Parts

OEM Part #:

0000-10454

EESI Part #:

1800-00031

Description:

 Disk

OEM Part #:

0475-0015-0003

EESI Part #:

1800-00024

Description:

BELLOWS ASSY WELDED 2.50 OD 1.75 ID 4.3 LOA

OEM Part #:

0475-0018-0001

EESI Part #:

1800-00023

Description:

BELLOWS ASSY,BEAM PROFILER

OEM Part #:

0992-60519 Rev E

EESI Part #:

1800-00032

Description:

 Disk

OEM Part #:

0992-60535 Rev B

EESI Part #:

1800-00033

Description:

 Disk

OEM Part #:

0992-60570-A

EESI Part #:

1800-00034

Description:

 Tube 6.9 x .984

OEM Part #:

0992-60573 Rev A

EESI Part #:

1800-00035

Description:

 Tube 14.00 x .984

OEM Part #:

0992-60601

EESI Part #:

1800-00036

Description:

 'Donut' 1.38 x .50 beveled

OEM Part #:

0992-60614-A

EESI Part #:

1800-00038

Description:

 Bonded 'L-Tube'

OEM Part #:

0992-60694

EESI Part #:

1800-00037

Description:

 Plate

OEM Part #:

17164510

EESI Part #:

1800-00002

Description:

TE Insulator

OEM Part #:

17174410

EESI Part #:

1800-00003

Description:

TE Insulator

OEM Part #:

17208240

EESI Part #:

1800-00001

Description:

TE Aperture

OEM Part #:

19S0170

EESI Part #:

1800-00022

Description:

NW25 COUPLING BELLOWS

OEM Part #:

19S0217

EESI Part #:

1800-00021

Description:

BELLOWS

OEM Part #:

203669

EESI Part #:

1800-00011

Description:

Bulb H Mod 200 PCU

OEM Part #:

280241

EESI Part #:

1800-00007

Description:

Heater Window/Lower Quartz Plate

OEM Part #:

281401

EESI Part #:

1800-00010

Description:

Quartz Tube

OEM Part #:

313806

EESI Part #:

1800-00017

Description:

Thermocouple Assy

OEM Part #:

319371

EESI Part #:

1800-00018

Description:

Assy Magnetron Water Cooled

OEM Part #:

392171

EESI Part #:

1800-00004

Description:

Sapphire Tube

OEM Part #:

396041

EESI Part #:

1800-00009

Description:

Tube Quartz Cooling

OEM Part #:

401260

EESI Part #:

1800-00025

Description:

Disk 1.00 x .125

OEM Part #:

401261

EESI Part #:

1800-00013

Description:

Orifice Sapphire

OEM Part #:

405231

EESI Part #:

1800-00012

Description:

Sapphire Pin

OEM Part #:

405231

EESI Part #:

1800-00026

Description:

Rod  0.120 x 1.250

OEM Part #:

405241

EESI Part #:

1800-00008

Description:

Heater Window/Quartz Plate Lower Sapphire Coated

OEM Part #:

412960

EESI Part #:

1800-00027

Description:

Disk  1.00 x .125

OEM Part #:

412961

EESI Part #:

1800-00006

Description:

Disk Sapphire

OEM Part #:

472811

EESI Part #:

1800-00014

Description:

Baffle Cooling Heater Window

OEM Part #:

47402

EESI Part #:

1800-00005

Description:

Quartz Lens UV Backed

OEM Part #:

47404

EESI Part #:

1800-00019

Description:

Quartz Plate

OEM Part #:

478401

EESI Part #:

1800-00015

Description:

Showerhead Upper Shielded

OEM Part #:

479312

EESI Part #:

1800-00016

Description:

Showerhead 8"

OEM Part #:

570740

EESI Part #:

1800-00028

Description:

Tube  1.550 x .085 x 16.00

OEM Part #:

570741 Rev A

EESI Part #:

1800-00029

Description:

Tube

OEM Part #:

584031

EESI Part #:

1800-00030

Description:

Orifice

OEM Part #:

584031

EESI Part #:

1800-00039

Description:

Orifice Sapphire

OEM Part #:

92571

EESI Part #:

1800-00020

Description:

Thermochuck Asy 150PC 208V TFE (CPI Design)