LAM Parts

OEM Part #:

06-0091

EESI Part #:

2800-00240

Description:

Quartz Plasma Chamber

OEM Part #:

14738-01

EESI Part #:

2800-00200

Description:

Bubbler Quartz

OEM Part #:

15367-01

EESI Part #:

2800-00193

Description:

Pin Lift Quartz

OEM Part #:

16531-01

EESI Part #:

2800-00387

Description:

Rod Diffuser Quartz Lamp

OEM Part #:

16532-01

EESI Part #:

2800-00194

Description:

Plate Quartz Lamp

OEM Part #:

16532-01

EESI Part #:

2800-00239

Description:

Top Plate Quartz

OEM Part #:

16784-01

EESI Part #:

2800-00195

Description:

Spool Quartz

OEM Part #:

17621-01

EESI Part #:

2800-00196

Description:

Plate Gas Dist 6”

OEM Part #:

17622-01

EESI Part #:

2800-00197

Description:

Plate Diffuser Quartz

OEM Part #:

17688-01

EESI Part #:

2800-00199

Description:

Gas Distribution Plate 200mm

OEM Part #:

2301721 Rev 3

EESI Part #:

2800-00092

Description:

Liner Ceramic, 100-150mm, CHMBR 2, 4, Upper Electrode(Drytek)

OEM Part #:

602006

EESI Part #:

2800-00091

Description:

Pin, Lift Lower Electrode (Drytek)

OEM Part #:

605-012620-001

EESI Part #:

2800-00361

Description:

PCB Index Dual SNSR (X)

OEM Part #:

713-011560-001

EESI Part #:

2800-00270

Description:

Teflon Shroud

OEM Part #:

713-011574-001

EESI Part #:

2800-00271

Description:

Plunger Wafer Clamp Upper

OEM Part #:

713-011575-001

EESI Part #:

2800-00272

Description:

Clamp Retaining Nut

OEM Part #:

713-011577-001

EESI Part #:

2800-00282

Description:

Retainer Washer

OEM Part #:

713-011578-001

EESI Part #:

2800-00273

Description:

Plunger Guide Sleeve

OEM Part #:

713-011579-001

EESI Part #:

2800-00274

Description:

Plunger Guide

OEM Part #:

713-011585-004

EESI Part #:

2800-00128

Description:

Cover Clamp Bolt "A"

OEM Part #:

713-011926-001

EESI Part #:

2800-00129

Description:

Cap Bolt Clamp Retain

OEM Part #:

713-018426-369

EESI Part #:

2800-00241

Description:

Insert, Vespel Ring

OEM Part #:

713-021267-001

EESI Part #:

2800-00275

Description:

Pin Clamp Alignment Head

OEM Part #:

713-028487-001

EESI Part #:

2800-00041

Description:

Vespel Confinement Ring

OEM Part #:

713-040539-001

EESI Part #:

2800-00385

Description:

LAM 12" Flex LRC Gaskets

OEM Part #:

713-066269-002

EESI Part #:

2800-00375

Description:

LAM 12" Flex LRC Gaskets

OEM Part #:

713-066825-001

EESI Part #:

2800-00378

Description:

LAM 12" Flex LRC Gaskets

OEM Part #:

713-069935-003

EESI Part #:

2800-00365

Description:

LAM 12" Flex LRC Gaskets

OEM Part #:

713-072792-003

EESI Part #:

2800-00344

Description:

Talon Gaskets 300mm

OEM Part #:

713-072792-003

EESI Part #:

2800-00366

Description:

LAM 12" Flex LRC Gaskets

OEM Part #:

713-073439-010

EESI Part #:

2800-00369

Description:

LAM 12" Flex LRC Gaskets

OEM Part #:

713-080721-001

EESI Part #:

2800-00381

Description:

LAM 12" Flex LRC Gaskets

OEM Part #:

713-088966-001

EESI Part #:

2800-00382

Description:

LAM 12" Flex LRC Gaskets

OEM Part #:

714-059445-025

EESI Part #:

2800-00374

Description:

LAM 12" Flex LRC Gaskets

OEM Part #:

714-065064-004

EESI Part #:

2800-00352

Description:

ABE Gaskets

OEM Part #:

714-072727-048

EESI Part #:

2800-00370

Description:

LAM 12" Flex LRC Gaskets

OEM Part #:

714-072728-003

EESI Part #:

2800-00371

Description:

LAM 12" Flex LRC Gaskets

OEM Part #:

715-007025-001

EESI Part #:

2800-00088

Description:

Electrode Aluminum Anodized

OEM Part #:

715-007469-001

EESI Part #:

2800-00242

Description:

Lower Electrode 6", 4 pin

OEM Part #:

715-007469-002

EESI Part #:

2800-00090

Description:

Electrode Lower 8" 4-Pin

OEM Part #:

715-007469-002

EESI Part #:

2800-00243

Description:

Lower Electrode 6", 4 pin

OEM Part #:

715-008721-001

EESI Part #:

2800-00089

Description:

Electrode Aluminum Anodized

OEM Part #:

715-009306-006

EESI Part #:

2800-00269

Description:

RING FOCUS 6"

OEM Part #:

715-009657-001

EESI Part #:

2800-00026

Description:

Ring Outer Anodized

OEM Part #:

715-009779-002

EESI Part #:

2800-00087

Description:

Cap Electrode

OEM Part #:

715-011531-002

EESI Part #:

2800-00265

Description:

Upper Electrode

OEM Part #:

715-011531-008

EESI Part #:

2800-00024

Description:

Electrode Aluminum Anodized 6"

OEM Part #:

715-011531-009

EESI Part #:

2800-00025

Description:

Electrode Aluminum Anodized 8"

OEM Part #:

715-011531-012

EESI Part #:

2800-00244

Description:

Electrode

OEM Part #:

715-011531-014

EESI Part #:

2800-00245

Description:

Electrode 8",

OEM Part #:

715-011531-015

EESI Part #:

2800-00232

Description:

Electrode Upper 6"

OEM Part #:

715-011531-102

EESI Part #:

2800-00246

Description:

Electrode 6"

OEM Part #:

715-011563-161

EESI Part #:

2800-00136

Description:

CLAMP, WAFER, DOMED, CERAMIC, 6", 1-FLAT, 4500

OEM Part #:

715-011565-001

EESI Part #:

2800-00410

Description:

Clamp Retaining Bolt

OEM Part #:

715-011565-002

EESI Part #:

2800-00127

Description:

Bolt Clamp Rtng

OEM Part #:

715-011622-201

EESI Part #:

2800-00389

Description:

Lifter 4 Pin Memory Metal

OEM Part #:

715-011639-006

EESI Part #:

2800-00266

Description:

Upper Electrode

OEM Part #:

715-011640-005

EESI Part #:

2800-00247

Description:

Focus Ring 4"

OEM Part #:

715-011640-006

EESI Part #:

2800-00018

Description:

Fing, Focus Anodized (Semi 6")

OEM Part #:

715-011664-004

EESI Part #:

2800-00276

Description:

Cap Lower Electrode 4"

OEM Part #:

715-011673-105

EESI Part #:

2800-00248

Description:

Lower Electrode 5",

OEM Part #:

715-011746-141

EESI Part #:

2800-00249

Description:

Plate Wafer Clamp 4"

OEM Part #:

715-011746-151

EESI Part #:

2800-00250

Description:

Plate Wafer Clamp 5"

OEM Part #:

715-011746-161

EESI Part #:

2800-00205

Description:

Aluminum Plate Wafer Clamp 6"

OEM Part #:

715-011925-001

EESI Part #:

2800-00277

Description:

Bolt Capped Clamp Retaining

OEM Part #:

715-015808-001

EESI Part #:

2800-00010

Description:

Shower Head

OEM Part #:

715-018991-006

EESI Part #:

2800-00252

Description:

Electrode Upper 8"

OEM Part #:

715-018991-206

EESI Part #:

2800-00019

Description:

Upper Electrode 6"

OEM Part #:

715-018991-208

EESI Part #:

2800-00251

Description:

Electrode Upper 8"

OEM Part #:

715-018991-226

EESI Part #:

2800-00434

Description:

ELCTD, ALUM, ANDZ, 6"

OEM Part #:

715-028087-005

EESI Part #:

2800-00253

Description:

Shroud 6" 2 mil hard

OEM Part #:

715-028554-004

EESI Part #:

2800-00388

Description:

Plate Upper Seal (8" Elect.) BF, LW, INT Pl anode

OEM Part #:

715-028559-001

EESI Part #:

2800-00254

Description:

Showerhead 6"

OEM Part #:

715-028606-161

EESI Part #:

2800-00255

Description:

Wafer Clamp 6"

OEM Part #:

715-030320-001

EESI Part #:

2800-00256

Description:

BSR Injection Ring

OEM Part #:

715-030860-001

EESI Part #:

2800-00084

Description:

Chamber Liner

OEM Part #:

715-11986-108

EESI Part #:

2800-00264

Description:

Lower Electrode

OEM Part #:

715-140124-001

EESI Part #:

2800-00430

Description:

Upper Baffle

OEM Part #:

715-140125-101

EESI Part #:

2800-00278

Description:

Baffle Lower

OEM Part #:

715-140126-001

EESI Part #:

2800-00429

Description:

Middle Baffle

OEM Part #:

715-140153-001

EESI Part #:

2800-00137

Description:

Coupling Ring, Ceramic.  Ref. 715-140153-001.

OEM Part #:

715-28608-161

EESI Part #:

2800-00257

Description:

Non-Contact Wafer Clamp

OEM Part #:

715-31752-206

EESI Part #:

2800-00258

Description:

Electrode Lower 6"

OEM Part #:

715-31752-208

EESI Part #:

2800-00259

Description:

Electrode Lower 8"

OEM Part #:

715-330000-090

EESI Part #:

2800-00260

Description:

Gas Injection Ring

OEM Part #:

715-3300394-002

EESI Part #:

2800-00001

Description:

Frog Leg

OEM Part #:

715-3300394-002

EESI Part #:

2800-00002

Description:

Frog Leg Rework

OEM Part #:

715-330135-001

EESI Part #:

2800-00261

Description:

BSR Injection Ring

OEM Part #:

715-330825-006

EESI Part #:

2800-00003

Description:

Chamber Liner

OEM Part #:

715-330825-006

EESI Part #:

2800-00004

Description:

Chamber Liner Rework

OEM Part #:

715-330825-007

EESI Part #:

2800-00020

OEM Part #:

715-330889-002

EESI Part #:

2800-00390

Description:

Ring Alum Insulator Lam 9600

OEM Part #:

715-330928-002

EESI Part #:

2800-00005

Description:

Chamber Liner

OEM Part #:

715-330981-001

EESI Part #:

2800-00006

Description:

Chamber Liner

OEM Part #:

715-330982-001

EESI Part #:

2800-00007

Description:

Chamber Liner

OEM Part #:

715-330984-001

EESI Part #:

2800-00262

Description:

BSR Injection Ring

OEM Part #:

715-330987-001

EESI Part #:

2800-00263

Description:

BSR Injection Ring

OEM Part #:

715-443178-300

EESI Part #:

2800-00086

Description:

Al, Hot Edge Ring

OEM Part #:

715-495014-001

EESI Part #:

2800-00008

Description:

Slit Door Liner Reanodise only

OEM Part #:

715-495014-001

EESI Part #:

2800-00009

Description:

Slit Door Liner Rework