LAM Parts

OEM Part #:

715-801021-012

EESI Part #:

2800-00085

Description:

Chamber Liner (2300Metal_AL)

OEM Part #:

716-000941-001

EESI Part #:

2800-00055

Description:

Quartz Plasma Disk Baffle

OEM Part #:

716-001427-003

EESI Part #:

2800-00138

Description:

CERAMIC DISK

OEM Part #:

716-001651-006

EESI Part #:

2800-00393

Description:

Ring Ceramic Edge Oxide

OEM Part #:

716-003473-802

EESI Part #:

2800-00421

Description:

IOZ 8 Hole Ceramic 2300 Metal

OEM Part #:

716-003543-001

EESI Part #:

2800-00077

Description:

Ring, Hot Edge, Si DFC, 300mm

OEM Part #:

716-003543-006

EESI Part #:

2800-00076

Description:

Ring, Hot Edge, Si, 300mm

OEM Part #:

716-003543-016

EESI Part #:

2800-00080

Description:

Ring, Hot Edge, Si, 300mm

OEM Part #:

716-0036516-02

EESI Part #:

2800-00326

Description:

Quartz Face Outer Electrode

OEM Part #:

716-003686-188

EESI Part #:

2800-00339

Description:

Edge Ring (Metal Chamber)

OEM Part #:

716-004655-001

EESI Part #:

2800-00293

Description:

Ring Quartz Upper

OEM Part #:

716-005205-003

EESI Part #:

2800-00069

Description:

Pl CVR Step Qtz 200mm 2300 Exelan

OEM Part #:

716-006721-001

EESI Part #:

2800-00093

Description:

3-Hole Ring

OEM Part #:

716-006721-001

EESI Part #:

2800-00139

Description:

Insulator Ring

OEM Part #:

716-006753-001

EESI Part #:

2800-00094

Description:

Insulator Ring

OEM Part #:

716-006753-001

EESI Part #:

2800-00140

Description:

Ceramic Insulator Ring.  Reference 716-006753-001

OEM Part #:

716-007136-002

EESI Part #:

2800-00211

Description:

Ring Quartz Upper HPT

OEM Part #:

716-007136-010

EESI Part #:

2800-00425

Description:

Ring Quartz Upper HPT

OEM Part #:

716-007136-011

EESI Part #:

2800-00303

Description:

Ring Quartz Upper HPT

OEM Part #:

716-008608-001

EESI Part #:

2800-00189

Description:

IEP Window Sapphire Gas Injector

OEM Part #:

716-008608-002

EESI Part #:

2800-00011

Description:

Window With Step

OEM Part #:

716-008645-001

EESI Part #:

2800-00023

Description:

Cover Ring Quartz HP

OEM Part #:

716-008645-004

EESI Part #:

2800-00426

Description:

Cover Ring Quartz HP

OEM Part #:

716-008645-005

EESI Part #:

2800-00304

Description:

Cover Ring Quartz HP

OEM Part #:

716-008718-001

EESI Part #:

2800-00060

Description:

Quartz Gas Injector

OEM Part #:

716-008854-001

EESI Part #:

2800-00228

Description:

Disk Diffuser Duocel 6"

OEM Part #:

716-011009-001

EESI Part #:

2800-00012

Description:

Window Sapphire

OEM Part #:

716-011009-001

EESI Part #:

2800-00028

Description:

Window Quartz

EESI Part #:

2800-00400

Description:

Window 7.75 x 1.5.x .25 - In Sapphire

OEM Part #:

716-011036-001

EESI Part #:

2800-00095

Description:

Orifice Ring

OEM Part #:

716-011057-002

EESI Part #:

2800-00413

Description:

Ring Filler Upper Alum

OEM Part #:

716-011427-001

EESI Part #:

2800-00030

Description:

DSQ Quartz Window

OEM Part #:

716-011493-001

EESI Part #:

2800-00031

Description:

DSQ Quartz Spacer

OEM Part #:

716-011493-001

EESI Part #:

2800-00300

Description:

Spacer Quartz P.R. (DSQ)

OEM Part #:

716-011510-001

EESI Part #:

2800-00096

Description:

3-Hole Ring

OEM Part #:

716-011533-001

EESI Part #:

2800-00022

Description:

NSG-OZ Quartz Window

OEM Part #:

716-011536-001

EESI Part #:

2800-00097

Description:

Ring Upper Electrode Insulator Ceramic

OEM Part #:

716-011540-001

EESI Part #:

2800-00391

Description:

Ring Ceramic Face Upper Electrode Lam 4400

OEM Part #:

716-011563-001

EESI Part #:

2800-00098

Description:

Clamp Ring 6"

OEM Part #:

716-011563-161

EESI Part #:

2800-00217

Description:

Plate Wafer Clamp 6" Dome

OEM Part #:

716-011570-001

EESI Part #:

2800-00141

Description:

ORIFICE FILLER W/C CERAMIC

OEM Part #:

716-011571-001

EESI Part #:

2800-00142

Description:

CERAMIC WASHER

OEM Part #:

716-011572-001

EESI Part #:

2800-00143

Description:

CERAMIC RETAINER CLAMP, 1/4 TURN

OEM Part #:

716-011572-001

EESI Part #:

2800-00216

Description:

Clamp Retainer, 1/4 Turn

OEM Part #:

716-011573-001

EESI Part #:

2800-00144

Description:

CERAMIC PLUNGER, SHORT

OEM Part #:

716-011573-001

EESI Part #:

2800-00145

Description:

Ceramic Plunger, 1/4 Turn

OEM Part #:

716-011573-004

EESI Part #:

2800-00146

Description:

CERAMIC PLUNGER LONG

OEM Part #:

716-011580-246

EESI Part #:

2800-00279

Description:

Plate Clamp 4"

OEM Part #:

716-011603-001

EESI Part #:

2800-00392

Description:

Plate Teflon Seal Chamber Lifter

OEM Part #:

716-011624-001

EESI Part #:

2800-00283

Description:

Ring Filter Ceramic

OEM Part #:

716-011624-007

EESI Part #:

2800-00342

Description:

Ring Ceramic

OEM Part #:

716-011758-016

EESI Part #:

2800-00099

Description:

Lower Combo Ring, 6"

OEM Part #:

716-011759-016

EESI Part #:

2800-00147

Description:

RING, MOUNTING, CERAMIC

OEM Part #:

716-011764-281

EESI Part #:

2800-00218

Description:

Plate Wafer Clamp 8" Dome No Flat

OEM Part #:

716-011830-006

EESI Part #:

2800-00394

Description:

Ring Focus Ceramic 6"

OEM Part #:

716-011922-001

EESI Part #:

2800-00100

Description:

Upper Electrode CeramicNg, 6"

OEM Part #:

716-011923-001

EESI Part #:

2800-00101

Description:

Clamp Attachment Ring 6"

OEM Part #:

716-011969-002

EESI Part #:

2800-00224

Description:

Ring Quartz Coupling 300mm

OEM Part #:

716-011969-100

EESI Part #:

2800-00132

Description:

RING,QTZ,COUPLING,HI EDGE,300MM

OEM Part #:

716-011969-100

EESI Part #:

2800-00173

Description:

RING,QTZ,COUPLING,HI EDGE,300MM

OEM Part #:

716-012639-023

EESI Part #:

2800-00318

Description:

Injector 1 CTR 8 RDL Quartz NSG

OEM Part #:

716-012639-024

EESI Part #:

2800-00042

Description:

Noz, Inj, 8X.055-45 Deg RD

OEM Part #:

716-012639-024

EESI Part #:

2800-00440

Description:

NOZZLE, INJ. 8x, .055-45DEG RDL-1CTR

OEM Part #:

716-012639-024

EESI Part #:

2800-00180

Description:

NOZZLE, INJ. 8x, .055-45DEG RDL-1CTR

OEM Part #:

716-012640-011

EESI Part #:

2800-00043

Description:

Window Gas Inj, Face Seal, Qtz, NSG

OEM Part #:

716-012640-012

EESI Part #:

2800-00044

Description:

Window Gas Inj, Face Seal, QR

OEM Part #:

716-012640-012

EESI Part #:

2800-00175

Description:

WINDOW,GAS INJ,FACE SEAL,QRTZ,NSG

OEM Part #:

716-013344-001

EESI Part #:

2800-00045

Description:

Ring Cover Outer GND

OEM Part #:

716-013344-001

EESI Part #:

2800-00174

Description:

RING,COVER,OUTER,GND

OEM Part #:

716-013350-010

EESI Part #:

2800-00315

Description:

SP IEP Optics 2, 4 Long NSG

OEM Part #:

716-013402-003

EESI Part #:

2800-00046

Description:

Cover H/E Ring Quartz

OEM Part #:

716-013402-003

EESI Part #:

2800-00178

Description:

Cover H/E Ring Quartz 300mm

OEM Part #:

716-013402-008

EESI Part #:

2800-00214

Description:

Cover H/E Ring Quartz

OEM Part #:

716-013423-001

EESI Part #:

2800-00013

Description:

Liner Sapphire

OEM Part #:

716-014843-001

EESI Part #:

2800-00047

Description:

6 Ring WAP Qtz Generic 17" DFC 300mm

OEM Part #:

716-014843-300

EESI Part #:

2800-00133

Description:

RING,WAP,QTZ,GENERIC,17IN,DFC

OEM Part #:

716-014843-300

EESI Part #:

2800-00441

Description:

RING,WAP,QTZ,GENERIC,17IN,DFC

OEM Part #:

716-014843-300

EESI Part #:

2800-00181

Description:

RING,WAP,QTZ,GENERIC,17IN,DFC

OEM Part #:

716-014843-303

EESI Part #:

2800-00183

Description:

Ring WAP Thk

OEM Part #:

716-016394-001

EESI Part #:

2800-00330

Description:

Ring Confinement One Piece HPT

OEM Part #:

716-016394-010

EESI Part #:

2800-00405

Description:

Ring Confinement One Piece HPT

OEM Part #:

716-016394-013

EESI Part #:

2800-00415

Description:

Ring Confinement One Piece HPT

OEM Part #:

716-016763-001

EESI Part #:

2800-00063

Description:

Ring Filler Inv Step 200mm

OEM Part #:

716-016763-001

EESI Part #:

2800-00070

Description:

Ring Filler Inv Step 200mm

OEM Part #:

716-016830-002

EESI Part #:

2800-00302

Description:

Ring Wrap Twist Top Stepped DFC200mm

OEM Part #:

716-016830-003

EESI Part #:

2800-00064

Description:

Ring Filler Inv Step 200mm

OEM Part #:

716-016830-003

EESI Part #:

2800-00071

Description:

Ring Filler Inv Step 200mm

OEM Part #:

716-016831-002

EESI Part #:

2800-00299

Description:

Ring WAP Konsi 51182

OEM Part #:

716-016831-007

EESI Part #:

2800-00065

Description:

Ring WAP Qtz Generic 200mm

OEM Part #:

716-016831-007

EESI Part #:

2800-00072

Description:

Ring WAP Qtz Generic 200mm

OEM Part #:

716-017112-002

EESI Part #:

2800-00328

Description:

Ring WAP Twist Top 17" 300mm EXELAN

OEM Part #:

716-017112-300

EESI Part #:

2800-00226

Description:

Ring WAP 17.07 x 1.10 THK AN SLT

OEM Part #:

716-017112-330

EESI Part #:

2800-00125

Description:

Ring WAP 17.07 x 1.10 Thk AN SLT

OEM Part #:

716-017112-330

EESI Part #:

2800-00179

Description:

RING,WAP,17.07X1.10THK,AN SLT

OEM Part #:

716-017581-002

EESI Part #:

2800-00223

Description:

Ring ELCTD 2 Piece

OEM Part #:

716-018468-090

EESI Part #:

2800-00325

Description:

Ring Cover Outer Ground .090 Thk Quartz

OEM Part #:

716-018468-130

EESI Part #:

2800-00323

Description:

Ring Cover Outer Ground .130 Thk Quartz

OEM Part #:

716-020904-016

EESI Part #:

2800-00102

Description:

Lower Focus Ring, BAC, 6"

OEM Part #:

716-020904-018

EESI Part #:

2800-00431

Description:

Ring Focus Edge

OEM Part #:

716-020905-001

EESI Part #:

2800-00103

Description:

Lower Filler Ring, BAC, 6"