LAM Parts

EESI Part #:

2800-00148

Description:

Lower Filler Ring, BAC, 6"

OEM Part #:

716-021209-001

EESI Part #:

2800-00319

Description:

BOT ADJ CPLG 2300 300mm  

OEM Part #:

716-021209-366

EESI Part #:

2800-00316

Description:

BOT ADJ CPLG 2300 300mm DZ

OEM Part #:

716-021209-368

EESI Part #:

2800-00333

Description:

BOT ADJ CPLG 2300 300mm DZ

OEM Part #:

716-021216-002

EESI Part #:

2800-00307

Description:

Top Adjust CPLG 2300 300mm

OEM Part #:

716-021216-367

EESI Part #:

2800-00329

Description:

Top ADJ CPLG 2300 300mm DZ

OEM Part #:

716-021323-001

EESI Part #:

2800-00032

Description:

Funnel Quartz Power Supply Module

OEM Part #:

716-021323-002

EESI Part #:

2800-00184

Description:

Quartz Funnel DSQ Chamber

OEM Part #:

716-021323-002

EESI Part #:

2800-00191

Description:

Quartz Funnel DSQ Chamber

OEM Part #:

716-021717-001

EESI Part #:

2800-00039

Description:

Bell Jar Sleeve Quartz

OEM Part #:

716-021717-002

EESI Part #:

2800-00040

Description:

Bell Jar Sleeve Quartz

OEM Part #:

716-022025-001

EESI Part #:

2800-00324

Description:

Ring Outer CPLG 2300 200mm

OEM Part #:

716-022030-004

EESI Part #:

2800-00285

Description:

SLV Quartz Stepped Pin DC Bias

OEM Part #:

716-023013-004

EESI Part #:

2800-00048

Description:

Ring Hot Edge Si DFC 300mm Flex

OEM Part #:

716-023013-004

EESI Part #:

2800-00177

Description:

RING,HOT EDGE,.195 HGT,SI,DUAL

OEM Part #:

716-023013-007

EESI Part #:

2800-00081

Description:

Ring, Hot Edge, 195 HGT, Si, 300mm

OEM Part #:

716-023013-020

EESI Part #:

2800-00079

Description:

Ring, Hot Edge, 195 HGT, Si, 300mm, SP

OEM Part #:

716-026652-002

EESI Part #:

2800-00123

Description:

Ring Edge BOT 200-300mm

OEM Part #:

716-026652-902

EESI Part #:

2800-00186

Description:

Ring Edge BOT 200-300mm

OEM Part #:

716-026652-911

EESI Part #:

2800-00414

OEM Part #:

716-026653-902

EESI Part #:

2800-00337

Description:

Bottom Edge Ring (KIYO)

OEM Part #:

716-026654-902

EESI Part #:

2800-00305

Description:

Ring Edge Bot Quartz 200-300 KONSI 51182

OEM Part #:

716-027425-001

EESI Part #:

2800-00317

Description:

Ring Cover Outer Stepped

OEM Part #:

716-027740-001

EESI Part #:

2800-00066

Description:

Window Quartz

OEM Part #:

716-027740-001

EESI Part #:

2800-00073

Description:

Window Quartz

OEM Part #:

716-027996-001

EESI Part #:

2800-00332

Description:

Electrode Outer Full Quartz Face

OEM Part #:

716-027997-001

EESI Part #:

2800-00331

Description:

Electrode Outer Half Quartz Face

OEM Part #:

716-028028-004

EESI Part #:

2800-00104

Description:

Upper Electrode Clamp Ring, 6"

OEM Part #:

716-028123-002

EESI Part #:

2800-00105

Description:

Ceramic Filler Ring, 6"

OEM Part #:

716-028123-003

EESI Part #:

2800-00295

Description:

Filler Ring

OEM Part #:

716-028414-014

EESI Part #:

2800-00280

Description:

Ring Focus

OEM Part #:

716-028414-015

EESI Part #:

2800-00149

Description:

RING, FOCUS, CERAMIC

OEM Part #:

716-028447-002

EESI Part #:

2800-00150

Description:

CERAMIC DISK

OEM Part #:

716-028454-012

EESI Part #:

2800-00033

Description:

Disk Quartz

OEM Part #:

716-028454-012

EESI Part #:

2800-00034

Description:

Disk Quartz

OEM Part #:

716-028454-015

EESI Part #:

2800-00398

Description:

Disk Quartz

OEM Part #:

716-028454-015N

EESI Part #:

2800-00234

Description:

TPC Quartz Window Y203 (Coated New Only)

OEM Part #:

716-028454-512

EESI Part #:

2800-00291

Description:

Disk Quartz

OEM Part #:

716-028454-513

EESI Part #:

2800-00419

Description:

Top Disk Quartz

OEM Part #:

716-028454-715

EESI Part #:

2800-00327

Description:

Disk Quartz HPQ

OEM Part #:

716-028454-715

EESI Part #:

2800-00401

Description:

Disk, Quartz

OEM Part #:

716-028668-261

EESI Part #:

2800-00219

Description:

Ring Clamp

OEM Part #:

716-028678-261

EESI Part #:

2800-00106

Description:

Ceramic Clamp Ring, 6"

OEM Part #:

716-028688-01

EESI Part #:

2800-00107

Description:

Clamp Lower Plate, 8"

OEM Part #:

716-028688-261

EESI Part #:

2800-00108

Description:

Plate, Bottom, Wafer Clamp, 6"

OEM Part #:

716-028721-261

EESI Part #:

2800-00220

Description:

Plate Bottom Wafer Clamp 6" Major Flat W/P

OEM Part #:

716-028721-281

EESI Part #:

2800-00221

Description:

Plate Bottom Wafer Clamp 6" Domed Shadow

OEM Part #:

716-028725-161

EESI Part #:

2800-00109

Description:

Clamp Ring 

OEM Part #:

716-029435-006

EESI Part #:

2800-00151

Description:

RING, ELECTRODE, CERAMIC

OEM Part #:

716-030135-001

EESI Part #:

2800-00152

Description:

CERAMIC RING

OEM Part #:

716-030136-001

EESI Part #:

2800-00110

Description:

Ceramic Focus Ring, 6"

OEM Part #:

716-031052-001

EESI Part #:

2800-00035

Description:

Window Quartz HDT Endpoint

OEM Part #:

716-031052-002

EESI Part #:

2800-00135

Description:

 Window Quartz HTD Endpoint

OEM Part #:

716-031052-002

EESI Part #:

2800-00402

Description:

Window, Quartz HTD Endpoint

OEM Part #:

716-031257-209

EESI Part #:

2800-00067

Description:

Ring Edge Top 2300

OEM Part #:

716-031257-209

EESI Part #:

2800-00074

Description:

Ring Edge Top 2300

OEM Part #:

716-031257-309

EESI Part #:

2800-00124

Description:

Ring Edge Top 2300

OEM Part #:

716-031257-531

EESI Part #:

2800-00187

Description:

Ring Edge Top Quartz EBP 300mm

OEM Part #:

716-031257-534

EESI Part #:

2800-00229

Description:

Edge Ring

OEM Part #:

716-031257-562

EESI Part #:

2800-00420

Description:

Ring Edge Tall Combo Quartz EBP 300mm

OEM Part #:

716-031257-909

EESI Part #:

2800-00287

Description:

Ring Edge Top Quartz 300mm

OEM Part #:

716-031453-001

EESI Part #:

2800-00432

Description:

R FLR LWR Chamber

OEM Part #:

716-031453-002

EESI Part #:

2800-00341

Description:

Lam KK

OEM Part #:

716-039961-001

EESI Part #:

2800-00172

Description:

Ring Focus Stepped Filter 200mm

OEM Part #:

716-039962-001

EESI Part #:

2800-00182

Description:

Edge Ring

OEM Part #:

716-040737-407

EESI Part #:

2800-00230

Description:

Coupling Ring Quartz

OEM Part #:

716-040738-402

EESI Part #:

2800-00082

Description:

R, HE, 4XX ESC, W/Flat, SGL XTL, 300mm

OEM Part #:

716-040738-412

EESI Part #:

2800-00083

Description:

R, HE, 4XX /FLAT, SGL  XTL, 300mm

OEM Part #:

716-044863-001

EESI Part #:

2800-00078

Description:

Ring, He, A/FL, Si, SGL XTAL, 1.51D, 300mm

OEM Part #:

716-045265-123

EESI Part #:

2800-00306

Description:

Ring Cover Gnd EXT Quartz 300mm

OEM Part #:

716-051609-003

EESI Part #:

2800-00038

Description:

Spacer Heater (4Pin Array)

OEM Part #:

716-069688-002

EESI Part #:

2800-00336

Description:

Silicon

OEM Part #:

716-069688-040

EESI Part #:

2800-00348

Description:

Flex 45 EX Silicon Electrode

OEM Part #:

716-082039-001

EESI Part #:

2800-00335

Description:

TCP Window Silicon

OEM Part #:

716-140068-001

EESI Part #:

2800-00111

Description:

ESC Ceramic Focus Ring, 6"

OEM Part #:

716-140069-002

EESI Part #:

2800-00112

Description:

Ring, Upper Insulator

OEM Part #:

716-140118-001

EESI Part #:

2800-00340

Description:

Focus Ring ESC 8"

EESI Part #:

2800-00236

Description:

Baffle 8" SiC-1H

OEM Part #:

716-140125-200

EESI Part #:

2800-00386

Description:

Baffle 8" SiC-1H

OEM Part #:

716-140125-401

EESI Part #:

2800-00235

Description:

Baffle 8" SiC-1H

OEM Part #:

716-140139-001

EESI Part #:

2800-00113

Description:

Hot Edge Ring or Focus Ring Insert, 8"

EESI Part #:

2800-00153

Description:

Hot Edge Ring, 200mm

OEM Part #:

716-140139-211

EESI Part #:

2800-00188

Description:

Hot Edge Ring Silicon

OEM Part #:

716-140139-213

EESI Part #:

2800-00301

Description:

Ring Hot Edge HI W

OEM Part #:

716-140139-311

EESI Part #:

2800-00433

Description:

R, Hot Edge Si SGL XTAL 8"

OEM Part #:

716-140163-001

EESI Part #:

2800-00114

Description:

Hot Edge Ring Ceramic

OEM Part #:

716-140163-261

EESI Part #:

2800-00362

Description:

Ring Hot Edge 15 Deg (Y)

OEM Part #:

716-140236-001

EESI Part #:

2800-00075

Description:

Confinement Ring Quartz (002, 003)

OEM Part #:

716-140236-003

EESI Part #:

2800-00036

Description:

Confinement Ring

OEM Part #:

716-140236-062

EESI Part #:

2800-00053

Description:

Confinement Ring Quartz

OEM Part #:

716-140236-803

EESI Part #:

2800-00322

Description:

Confinement Ring

OEM Part #:

716-140427-001

EESI Part #:

2800-00154

Description:

SAME AS 716-140427-001 IN CERAMIC

OEM Part #:

716-140432-001

EESI Part #:

2800-00357

Description:

Ring Upper Keyed

OEM Part #:

716-140432-002

EESI Part #:

2800-00290

Description:

Insert Ring Upper Keyed

OEM Part #:

716-140432-004

EESI Part #:

2800-00298

Description:

Quartz Ring Upper, Konsi 51182

OEM Part #:

716-140432-061

EESI Part #:

2800-00409

Description:

Quartz Ring

OEM Part #:

716-140432-802

EESI Part #:

2800-00321

Description:

LS Ring Upper Keyed

OEM Part #:

716-140432-804

EESI Part #:

2800-00363

Description:

Ring Upper Keyed

OEM Part #:

716-160255-002

EESI Part #:

2800-00027

Description:

Bell Jar Sleeve Quartz ISO CH 4500

OEM Part #:

716-230121-001

EESI Part #:

2800-00115

Description:

RF Shaped Window (6" or 8")