Novellus Parts

OEM Part #:

EESI Part #:

2300-00459

Description:

Spacer Top Quartz

OEM Part #:

00-674505-00

EESI Part #:

2300-00228

Description:

Ceramic Clip Ring, 4"

OEM Part #:

00-674782-00

EESI Part #:

2300-00229

Description:

Ceramic Clip Ring, 5"

OEM Part #:

00-682216-00

EESI Part #:

2300-00230

Description:

Ceramic Clip Ring, 6"

OEM Part #:

02-00099-00

EESI Part #:

2300-00130

Description:

Robot Rebuild Kit

OEM Part #:

02-00170-00

EESI Part #:

2300-00276

Description:

Wafer on Paddle

OEM Part #:

02-00343-01

EESI Part #:

2300-00012

Description:

Harness Assembly, Sensor, 25.5"

OEM Part #:

02-00343-02

EESI Part #:

2300-00013

Description:

Harness Assembly, Sensor, 12.0"

OEM Part #:

02-00343-03

EESI Part #:

2300-00014

Description:

Harness Assembly, Sensor, 17.5"

OEM Part #:

02-00343-04

EESI Part #:

2300-00015

Description:

Harness Assembly, Sensor, 26.5"

OEM Part #:

02-00363-00

EESI Part #:

2300-00092

Description:

Kit, Wafer Size With platform, Optical, 200mm

OEM Part #:

02-00363-00

EESI Part #:

2300-00131

Description:

Kit Wafer Size W/Platform Optical 200mm

OEM Part #:

02-00364-00

EESI Part #:

2300-00093

Description:

Kit, Wafer Size With Platform, Optical, 150mm

OEM Part #:

02-00364-00

EESI Part #:

2300-00132

Description:

Kit Wafer Size W/Platform Optical 150mm

OEM Part #:

02-00397-00

EESI Part #:

2300-00016

Description:

Harness Assembly, Sensor 26.5"

OEM Part #:

02-029514-01

EESI Part #:

2300-00097

Description:

Indexer Assy, Left, C2

OEM Part #:

02-029514-02

EESI Part #:

2300-00098

Description:

Indexer Assy, Right C2

OEM Part #:

02-033134-00

EESI Part #:

2300-00195

Description:

8" Heater Pedestal Refurb

OEM Part #:

02-042566-00

EESI Part #:

2300-00447

Description:

New Novellus Speed Dome

OEM Part #:

02-045721-00

EESI Part #:

2300-00194

Description:

6" Heater Pedestal Refurb

OEM Part #:

02-054574-00

EESI Part #:

2300-00140

Description:

Assy. Holder, MOER Ring

OEM Part #:

02-106507-00

EESI Part #:

2300-00444

Description:

(C2) Spindle 8"

OEM Part #:

02-109622-00

EESI Part #:

2300-00429

Description:

Assy Lift Pin Actuator 300mm

OEM Part #:

02-111903-0

EESI Part #:

2300-00211

Description:

Feed thru Assembly, Heater

OEM Part #:

02-130617-00

EESI Part #:

2300-00411

Description:

300mm Spindle (Gear Motor Type)

OEM Part #:

02-130617-00

EESI Part #:

2300-00436

Description:

300mm Spindle (Gear Motor Type)

OEM Part #:

02-134263-00

EESI Part #:

2300-00438

Description:

Novellus ESC Referb

OEM Part #:

02-136089-00

EESI Part #:

2300-00409

Description:

Assy Lift Pin Actuator VCTR

OEM Part #:

02-159137-00

EESI Part #:

2300-00412

Description:

300mm Spindle (Gear Motor Type)

OEM Part #:

02-159137-00

EESI Part #:

2300-00437

Description:

300mm Spindle (Gear Motor Type)

OEM Part #:

02-159939-00

EESI Part #:

2300-00416

Description:

ESC Bellows 4 ST PED INC625 300mm

OEM Part #:

02-160858-00

EESI Part #:

2300-00414

Description:

Lift Assy Cool Pedestal Loadlock 300mm

OEM Part #:

02-252432-00

EESI Part #:

2300-00115

Description:

12" Spindle Assy

OEM Part #:

02-252596-00

EESI Part #:

2300-00113

Description:

Pedestal Heater Referb.

OEM Part #:

02-259457-00

EESI Part #:

2300-00116

Description:

12" Spindle Assy

OEM Part #:

02-259783-00

EESI Part #:

2300-00413

Description:

PED Lift Assy Preheat C3VCTR 300mm

OEM Part #:

02-259783-00

EESI Part #:

2300-00434

Description:

Pedestal Lidt Assy Preheat 300mm

OEM Part #:

02-277948-00

EESI Part #:

2300-00407

OEM Part #:

02-288189-00

EESI Part #:

2300-00415

Description:

Lift Pin Actuator 300mm

OEM Part #:

02-300478-00

EESI Part #:

2300-00425

Description:

Inova Heater 300mm

OEM Part #:

02-307391-00

EESI Part #:

2300-00446

Description:

Assy Bell Jar G10, C2SPD-S

OEM Part #:

02-324753-00

EESI Part #:

2300-00410

Description:

300mm Spindle (Oil Type)

OEM Part #:

02-324753-00

EESI Part #:

2300-00435

Description:

300mm Spindle (Oil Type)

OEM Part #:

03-00135-00

EESI Part #:

2300-00310

Description:

Assy Cable 141

OEM Part #:

03-00258-00

EESI Part #:

2300-00448

Description:

Shower Head

OEM Part #:

04-128956-00

EESI Part #:

2300-00135

Description:

12" Welded Bellow

OEM Part #:

04-128956-00

EESI Part #:

2300-00470

Description:

12" Welded Bellow (Novellus)

OEM Part #:

04-264557-00

EESI Part #:

2300-00231

Description:

Ceramic Plasma Tube, Dry Etch.

OEM Part #:

04-718996-01

EESI Part #:

2300-00456

Description:

Assy Bellows Clip ACT

OEM Part #:

05-00221-02

EESI Part #:

2300-00094

Description:

Microcontacmination Upgrade

OEM Part #:

05-00221-02

EESI Part #:

2300-00133

Description:

Microcontacmination Upgrade

OEM Part #:

05-00229-00

EESI Part #:

2300-00095

Description:

Station, Cooling Upgrade

OEM Part #:

05-00229-00

EESI Part #:

2300-00134

Description:

Station Cooling Upgrade

OEM Part #:

05-027019-00

EESI Part #:

2300-00096

Description:

External Heated Gate & Throttle Valves

OEM Part #:

05-113897-00

EESI Part #:

2300-00445

Description:

(C1) Spindle 8"

OEM Part #:

05-2911 R1

EESI Part #:

2300-00325

Description:

Weldment Plate Bottom

OEM Part #:

05-3024 R5

EESI Part #:

2300-00326

Description:

Tube funnel

OEM Part #:

06-0012-03 RH

EESI Part #:

2300-00327

Description:

H Injector

OEM Part #:

06-0032

EESI Part #:

2300-00328

Description:

Baffle injector

OEM Part #:

06-0060-01 R1

EESI Part #:

2300-00329

Description:

Wafer Cassette

OEM Part #:

06-0091 R C

EESI Part #:

2300-00330

Description:

Chamber plasma

OEM Part #:

06-0111 R E

EESI Part #:

2300-00331

Description:

Boat 200mm VHP

OEM Part #:

06-01132 R 3

EESI Part #:

2300-00334

Description:

Coupling 2-Way

OEM Part #:

06-01142   

EESI Part #:

2300-00335

Description:

Plate Middle Shower

OEM Part #:

06-0118 R D

EESI Part #:

2300-00332

Description:

Boat wafers 100mm

OEM Part #:

06-0124 R 2

EESI Part #:

2300-00333

Description:

Cap ball

OEM Part #:

06-0142

EESI Part #:

2300-00103

Description:

Showerhead Disk

OEM Part #:

06-0152

EESI Part #:

2300-00106

Description:

Showerhead 150mm Bottom

OEM Part #:

06-0152 R B

EESI Part #:

2300-00336

Description:

Shower head 6" bottom

OEM Part #:

06-2431 R B

EESI Part #:

2300-00337

Description:

Pin cool STA .030head

OEM Part #:

06-2456 R A

EESI Part #:

2300-00338

Description:

Tube plasma

OEM Part #:

06-2486 R 1

EESI Part #:

2300-00339

Description:

Plate pattern

OEM Part #:

06-2510 R 3

EESI Part #:

2300-00340

Description:

Plate Top upper

OEM Part #:

06-2511 R 2

EESI Part #:

2300-00341

Description:

Tubing 10x12

OEM Part #:

06-2514 R 1

EESI Part #:

2300-00342

Description:

Plate bottom

OEM Part #:

06-2516 R 1

EESI Part #:

2300-00343

Description:

Plate Top

OEM Part #:

06-2521 R A

EESI Part #:

2300-00344

Description:

Plate 4.08 OD x 1.25ID

OEM Part #:

06-2545 R A

EESI Part #:

2300-00345

Description:

Spool plasma

OEM Part #:

06-2561 R 4

EESI Part #:

2300-00346

Description:

Isolating plate

OEM Part #:

06-2567 -0 R A

EESI Part #:

2300-00347

Description:

Bottom isolating ring

OEM Part #:

06-2567 R A

EESI Part #:

2300-00348

Description:

Isolating plate ring carrier

OEM Part #:

06-2568 R C 

EESI Part #:

2300-00349

Description:

Centering Ring 200mm Platen Wall Isola

OEM Part #:

06-2570 R C

EESI Part #:

2300-00350

Description:

Shower head 1.580 ID

OEM Part #:

06-2571 R 1

EESI Part #:

2300-00351

Description:

Paid load rock

OEM Part #:

06-2576 R A

EESI Part #:

2300-00352

Description:

Boat 150mm wafer 81 slots

OEM Part #:

06-2583 R 2

EESI Part #:

2300-00353

Description:

Pin lift

EESI Part #:

2300-00354

Description:

Shower Head  1.83 ID

OEM Part #:

06-2593 R A

EESI Part #:

2300-00355

Description:

Centering ring 150mm

OEM Part #:

06-2598 R A

EESI Part #:

2300-00356

Description:

Pin Lift

OEM Part #:

06-2599 R A

EESI Part #:

2300-00357

Description:

Plate 4.08 OD x 1.75 ID

OEM Part #:

06-2606 R B

EESI Part #:

2300-00358

Description:

Boat 81 slots

OEM Part #:

06-2612 R B

EESI Part #:

2300-00359

Description:

Key isolating plate

OEM Part #:

06-2619 R A

EESI Part #:

2300-00360

Description:

Plate tri adaptor

OEM Part #:

06-2620 R A

EESI Part #:

2300-00361

Description:

Pin plug

OEM Part #:

06-2632 R A

EESI Part #:

2300-00362

Description:

Cap isolator

OEM Part #:

06-2640 R C

EESI Part #:

2300-00363

Description:

Spool plasma

OEM Part #:

06-2694 R B

EESI Part #:

2300-00365

Description:

Chamber plasma plus

OEM Part #:

06-2697 R A

EESI Part #:

2300-00364

Description:

Quartz spool plasma

OEM Part #:

06-2704 R A

EESI Part #:

2300-00366

Description:

Plate gas dist.200mm

OEM Part #:

06-2705 R 2

EESI Part #:

2300-00367

Description:

Liner quartz