Novellus Parts

OEM Part #:

15-01122-00

EESI Part #:

2300-00071

Description:

Bracket, Paddle, 200mm

OEM Part #:

15-01127-00

EESI Part #:

2300-00072

Description:

Paddle, Optical, 200mm

OEM Part #:

15-01136-00

EESI Part #:

2300-00313

Description:

Bracket Arm

OEM Part #:

15-01146-00

EESI Part #:

2300-00073

Description:

Panel, side LL

OEM Part #:

15-028766-00

EESI Part #:

2300-00144

Description:

Ring, Guard, 200mm

OEM Part #:

15-032014-00

EESI Part #:

2300-00074

Description:

Window, Quartz, Etch Resistant Sapphire Coated

OEM Part #:

15-032014-01

EESI Part #:

2300-00238

Description:

Window Quartz Etch Resistant

OEM Part #:

15-032014-01

EESI Part #:

2300-00266

Description:

Window Quartz Etch Resistant Coated

OEM Part #:

15-032016-00

EESI Part #:

2300-00145

Description:

Pin, Vented for Htr. Block

OEM Part #:

15-032452-00

EESI Part #:

2300-00224

Description:

Window, Lexan, Chamber

OEM Part #:

15-032502-00

EESI Part #:

2300-00146

Description:

Pin, Wafer Lift

OEM Part #:

15-032631-00

EESI Part #:

2300-00075

Description:

Flange, Keyed

OEM Part #:

15-032777-00

EESI Part #:

2300-00147

Description:

Excl Ring, 200mm, 2.0mm, OH, Semi

OEM Part #:

15-032939-00

EESI Part #:

2300-00148

Description:

Excl Ring, 200mm, 2.25mm, OH, Semi

OEM Part #:

15-033946-00

EESI Part #:

2300-00439

Description:

Cover Plate Quartz

OEM Part #:

15-033947-00

EESI Part #:

2300-00149

Description:

Protective E-Chuck Cover, Ceramic (PEC)

OEM Part #:

15-034333-00

EESI Part #:

2300-00150

Description:

Tube, Process Injector

OEM Part #:

15-034333-00

EESI Part #:

2300-00151

Description:

Tube, Process Injector, SPEED, 4.13"

OEM Part #:

15-046814-00

EESI Part #:

2300-00451

Description:

Gas Ring 

OEM Part #:

15-050160-15

EESI Part #:

2300-00152

Description:

Tube, Injector, High Purity, 1.5"

OEM Part #:

15-050160-20

EESI Part #:

2300-00466

Description:

Ceramic Insulator

OEM Part #:

15-050160-41

EESI Part #:

2300-00440

Description:

Tube Injector Hi-Purity

OEM Part #:

15-052619-00

EESI Part #:

2300-00153

Description:

Ceramic Tong, 8"

OEM Part #:

15-053271-02

EESI Part #:

2300-00154

Description:

Injector 8" Long Clean, 300mm

OEM Part #:

15-053394-01

EESI Part #:

2300-00076

Description:

Min contact Area, Fork, 150mm

OEM Part #:

15-053394-02

EESI Part #:

2300-00077

Description:

Min Contact Area, Fork, 200mm

OEM Part #:

15-053394-03

EESI Part #:

2300-00210

Description:

Fork, Finger, Min Contact Area

OEM Part #:

15-053394-04

EESI Part #:

2300-00155

Description:

Dimpled Fork Finger, 8"

OEM Part #:

15-054277-02

EESI Part #:

2300-00290

Description:

Rod 0.125 x 4.340

OEM Part #:

15-054296

EESI Part #:

2300-00002

Description:

Rod Sapphire

OEM Part #:

15-054296-00

EESI Part #:

2300-00291

Description:

Rod 0.1830 x .190

OEM Part #:

15-054434-01

EESI Part #:

2300-00156

Description:

Excl Ring, 200mm, 3.0mm, OH, Semi

OEM Part #:

15-054583-00

EESI Part #:

2300-00157

Description:

Clip Retaining, MOER Holder

OEM Part #:

15-054595-00

EESI Part #:

2300-00158

Description:

Screw, Ceramic, 1/4-28, Guide

OEM Part #:

15-055546-04

EESI Part #:

2300-00159

Description:

Pin, Wafer Lift

OEM Part #:

15-08386-00

EESI Part #:

2300-00009

Description:

Washer #10 Nickel

OEM Part #:

15-100263-00

EESI Part #:

2300-00160

Description:

Robot Paddie, Ceramic

OEM Part #:

15-100603-00

EESI Part #:

2300-00161

Description:

Insulator, Gas Dist.

OEM Part #:

15-100641-00

EESI Part #:

2300-00373

Description:

Window viewport inner

OEM Part #:

15-101482-00

EESI Part #:

2300-00219

Description:

Fork Top PLT A Antideflect SEQ

OEM Part #:

15-101482-01

EESI Part #:

2300-00220

Description:

Fork Top PLT B Antideflect SEQ

OEM Part #:

15-101482-02

EESI Part #:

2300-00221

Description:

Fork Top PLT C Antideflect SEQ

OEM Part #:

15-103651-00

EESI Part #:

2300-00162

Description:

Ring, Guard, Counterbore, 200mm, High Purity

OEM Part #:

15-103913-00

EESI Part #:

2300-00099

Description:

Clamp Strap Feed thru

OEM Part #:

15-103913-02

EESI Part #:

2300-00216

Description:

Clamp, Strap, Feed thru

OEM Part #:

15-104288-00

EESI Part #:

2300-00294

Description:

Rod "Lift Pin" .187 x .400

OEM Part #:

15-104289-00

EESI Part #:

2300-00163

Description:

Wheel Block, Ped, Ceramic

OEM Part #:

15-10715-00

EESI Part #:

2300-00164

Description:

Altus Ceramic Ring (no holes) 2.0mm

OEM Part #:

15-107698-00

EESI Part #:

2300-00165

Description:

Cap. Ceramic, Feed thru

OEM Part #:

15-108174-00

EESI Part #:

2300-00006

Description:

Cup

OEM Part #:

15-108307-00

EESI Part #:

2300-00100

Description:

Clamp RF Strap Aluminum

OEM Part #:

15-108307-00

EESI Part #:

2300-00214

Description:

Clamp, RF Strap

OEM Part #:

15-108330-00

EESI Part #:

2300-00166

Description:

Ceramic Spring, 8"

OEM Part #:

15-109369-00

EESI Part #:

2300-00295

Description:

Rod Lift Pin

OEM Part #:

15-110411-00

EESI Part #:

2300-00003

Description:

Window Sapphire

OEM Part #:

15-110411-00N

EESI Part #:

2300-00296

Description:

Window Sapphire Concept 1 10.25 x 3.0 x .250

OEM Part #:

15-111482-00

EESI Part #:

2300-00297

Description:

Window 1.17 x 10.25

OEM Part #:

15-11188-00

EESI Part #:

2300-00222

Description:

Window, Hatch, TM DLCM

OEM Part #:

15-112447-02

EESI Part #:

2300-00167

Description:

I Pin for W-Dep Heater Pedestal

OEM Part #:

15-11263-02

EESI Part #:

2300-00168

Description:

View Port Window, STI, Quartz with Sapphire Coating

OEM Part #:

15-114331-00

EESI Part #:

2300-00007

Description:

Screw

OEM Part #:

15-114331-00

EESI Part #:

2300-00215

Description:

Screw Cap, 1/4-20 X .50 LG, NI

OEM Part #:

15-11507-00

EESI Part #:

2300-00169

Description:

Excl Ring, 200mm, 1.5mm, OH, Semi

OEM Part #:

15-11606-00

EESI Part #:

2300-00170

Description:

Insulator, Gas Dist

OEM Part #:

15-118123-00

EESI Part #:

2300-00441

Description:

Ceramic Ring INOVA 300mm Large

OEM Part #:

15-120150-01

EESI Part #:

2300-00171

Description:

Nanofill injector, 2.3"

OEM Part #:

15-120150-03

EESI Part #:

2300-00172

Description:

Nanofill Injector, 0.50"

OEM Part #:

15-120150-04

EESI Part #:

2300-00173

Description:

Nanofill Injector, 2.8"

OEM Part #:

15-122086-00

EESI Part #:

2300-00174

Description:

Clampable E-Chuck Cover, (C-PEC w/OD Flat)

OEM Part #:

15-122178-00

EESI Part #:

2300-00175

Description:

300mm Carrier Ring

OEM Part #:

15-122274-00

EESI Part #:

2300-00298

Description:

Rod 0.123 x 5.180

OEM Part #:

15-123086-01

EESI Part #:

2300-00176

Description:

Tube, Injector, 7.5", Closed End Long

OEM Part #:

15-130746-01

EESI Part #:

2300-00209

Description:

Fork, Finger, Min Contact Area

OEM Part #:

15-133091-00

EESI Part #:

2300-00299

Description:

Rod 0.123 x 5.180

OEM Part #:

15-136420-00

EESI Part #:

2300-00300

Description:

Rod 0.123 x 4.702

OEM Part #:

15-136420-00N

EESI Part #:

2300-00301

Description:

Rod 0.123 x 4.702

OEM Part #:

15-136420-01

EESI Part #:

2300-00302

Description:

Rod 0.123 x 4.702

OEM Part #:

15-144133-00

EESI Part #:

2300-00177

Description:

Excl Ring, 200mm, 2.75mm, OH, Semi

OEM Part #:

15-149982-01

EESI Part #:

2300-00178

Description:

Non Copper Guard Ring, 300mm

OEM Part #:

15-151243-00

EESI Part #:

2300-00179

Description:

Tube, THK, Cleaning, High Purity, 4.13"

OEM Part #:

15-151683-00

EESI Part #:

2300-00264

Description:

Sapphire Window

OEM Part #:

15-154277-00 

EESI Part #:

2300-00004

Description:

Rod Sapphire

OEM Part #:

15-158026-00

EESI Part #:

2300-00180

Description:

Injector, 1" FSG SPEED 300mm

OEM Part #:

15-158185-00

EESI Part #:

2300-00181

Description:

Nanofill II Clean Tube

OEM Part #:

15-161439-00

EESI Part #:

2300-00374

Description:

Plate Quartz Isolation

OEM Part #:

15-164628-00

EESI Part #:

2300-00375

Description:

View port

OEM Part #:

15-169646-00

EESI Part #:

2300-00454

Description:

Nozzle 

OEM Part #:

15-169647-00

EESI Part #:

2300-00455

Description:

Nozzle

OEM Part #:

15-169666-00

EESI Part #:

2300-00182

Description:

Tube, Injector, Long Closed Tube STI/PSG

OEM Part #:

15-169667-00

EESI Part #:

2300-00183

Description:

Injector Short Open Tube STI/PSG

OEM Part #:

15-170594-00

EESI Part #:

2300-00303

Description:

Disk 1.95 x .031

OEM Part #:

15-250453-00

EESI Part #:

2300-00184

Description:

Plug, Sapphire

OEM Part #:

15-250878-00

EESI Part #:

2300-00185

Description:

Screw, Holder, Retaining

OEM Part #:

15-251538-00

EESI Part #:

2300-00304

Description:

Disk 4.4

OEM Part #:

15-251847-00

EESI Part #:

2300-00186

Description:

Injector Short Closed Tube STI/PSG

OEM Part #:

15-253122-00

EESI Part #:

2300-00101

Description:

Anode, Copper 8" Round

OEM Part #:

15-256742-00

EESI Part #:

2300-00187

Description:

Ring, Ceramic with Arc Spray

OEM Part #:

15-257351-00

EESI Part #:

2300-00305

Description:

Pin

OEM Part #:

15-270165-00

EESI Part #:

2300-00420

Description:

ESC Pink 300mm

OEM Part #:

15-276648-00

EESI Part #:

2300-00453

Description:

Distribution