Novellus Parts

OEM Part #:

15-277460-00

EESI Part #:

2300-00461

Description:

Ceramic Ring

OEM Part #:

15-278968-00

EESI Part #:

2300-00188

Description:

Injector Short, Honeycomb, STI/PSG

OEM Part #:

15-288460-00

EESI Part #:

2300-00306

Description:

Lift Pin 0.1875 x 1.00

OEM Part #:

15-302588-00

EESI Part #:

2300-00405

Description:

Membrane (Cationic) Filter

OEM Part #:

15-303151-00

EESI Part #:

2300-00376

Description:

Window EBR

OEM Part #:

15-336064-00

EESI Part #:

2300-00406

Description:

Bell Jar C3 SPD

OEM Part #:

15-336516-00

EESI Part #:

2300-00377

Description:

Orifice diffusion

OEM Part #:

15-337510-00

EESI Part #:

2300-00378

Description:

Orifice diffusion

OEM Part #:

15-337511-00

EESI Part #:

2300-00379

Description:

Orifice diffusion

OEM Part #:

15-345274-00

EESI Part #:

2300-00380

Description:

Orifice diffusion

OEM Part #:

15-392383-00

EESI Part #:

2300-00404

Description:

Nozzle Ceramic

OEM Part #:

15367-01

EESI Part #:

2300-00382

Description:

Lift Pin Quartz

OEM Part #:

16-00092-00

EESI Part #:

2300-00078

Description:

Wire, Insulated, Ceramic Bead, Short

OEM Part #:

16-00098-00

EESI Part #:

2300-00079

Description:

Wire, Insulated, Ceramic Bead, Long

OEM Part #:

16-033931-00

EESI Part #:

2300-00080

Description:

Showerhead, Pinned, 200mm

OEM Part #:

16-033932-00

EESI Part #:

2300-00011

Description:

150mm Showerhead

OEM Part #:

16-100488-00

EESI Part #:

2300-00119

Description:

300mm Shower Head

OEM Part #:

16-100488-00

EESI Part #:

2300-00430

Description:

Showerhead 300mm

OEM Part #:

16-103973-00

EESI Part #:

2300-00452

Description:

Turbo Screen

OEM Part #:

16-118351-01

EESI Part #:

2300-00427

Description:

Pedestal Bellows 300mm

OEM Part #:

16-128855-00

EESI Part #:

2300-00428

Description:

Back Side AR Bump Bellows 300mm

OEM Part #:

16-129269-00

EESI Part #:

2300-00117

Description:

12"PreClean pedestal bellows

OEM Part #:

16-132590-00

EESI Part #:

2300-00120

Description:

300mm Shower Head

OEM Part #:

16-150325-00

EESI Part #:

2300-00431

Description:

Mixing Unit 300mm

OEM Part #:

16-159939-00

EESI Part #:

2300-00419

Description:

ESC Bellows 4.00 Stroke Pending 625 300mm

OEM Part #:

16-253739-00

EESI Part #:

2300-00418

Description:

Gas Ring 300mm

OEM Part #:

16-256994-00

EESI Part #:

2300-00121

Description:

300mm Shower Head

OEM Part #:

16-271392-00

EESI Part #:

2300-00319

Description:

Shower Head 300mm

OEM Part #:

16-277520-00

EESI Part #:

2300-00320

Description:

Shower Head 13"

OEM Part #:

16-343016-00

EESI Part #:

2300-00426

Description:

Inova Heater 300mm

OEM Part #:

16337-01

EESI Part #:

2300-00383

Description:

Quartz Cooler

OEM Part #:

16337-02

EESI Part #:

2300-00235

Description:

Collar Quartz

OEM Part #:

16359-01

EESI Part #:

2300-00384

Description:

Quartz plasma chamber

OEM Part #:

16531-01

EESI Part #:

2300-00457

Description:

Rod Diffuser Quartz lamp

OEM Part #:

16532-01

EESI Part #:

2300-00385

Description:

Plate Lamp

OEM Part #:

16734-02

EESI Part #:

2300-00460

Description:

Chamber Quartz 80mm ( Pan Assy.)

OEM Part #:

16784-01

EESI Part #:

2300-00386

Description:

Quartz spool

OEM Part #:

17-00094-00

EESI Part #:

2300-00270

Description:

Strap RF

OEM Part #:

17-00094-01

EESI Part #:

2300-00081

Description:

Strap, LF Bias, Laum

OEM Part #:

17-00148-00

EESI Part #:

2300-00082

Description:

Spring, Fork

OEM Part #:

17-101-596-00

EESI Part #:

2300-00218

Description:

Retainer, Fork, SEQ

OEM Part #:

17-103987-00

EESI Part #:

2300-00190

Description:

Strap RF

OEM Part #:

17289-01

EESI Part #:

2300-00387

Description:

Pin lift

OEM Part #:

17291-01

EESI Part #:

2300-00388

Description:

Pin cool

OEM Part #:

17302-01

EESI Part #:

2300-00107

Description:

Showerhead Upper Chamber

OEM Part #:

17302-01

EESI Part #:

2300-00389

Description:

Weldment Top Shower Head

OEM Part #:

17303-01

EESI Part #:

2300-00104

Description:

Plate Middle Showerhead

OEM Part #:

17303-01

EESI Part #:

2300-00390

Description:

Plate middle shower

OEM Part #:

17304-01

EESI Part #:

2300-00108

Description:

Showerhead Lower Chamber

OEM Part #:

17304-01

EESI Part #:

2300-00391

Description:

Weldment bottom

OEM Part #:

17621-01

EESI Part #:

2300-00112

Description:

Quartz Plate

OEM Part #:

17621-01

EESI Part #:

2300-00392

Description:

Plate Gas Dist.

OEM Part #:

17622-01

EESI Part #:

2300-00393

Description:

Plate diffuser lamp 4"

OEM Part #:

17688-01

EESI Part #:

2300-00394

Description:

Plate gas dist.200mm

OEM Part #:

19-00056-00

EESI Part #:

2300-00083

Description:

Feedthrough Assy, Electrical

OEM Part #:

19-00056-00

EESI Part #:

2300-00213

Description:

Feed thru Assembly, Heater

OEM Part #:

19-00111-00

EESI Part #:

2300-00309

Description:

Lead Screw

OEM Part #:

19-00147-00

EESI Part #:

2300-00321

Description:

Gear EXT.

OEM Part #:

19-00154-00

EESI Part #:

2300-00450

Description:

Heater Block  Without Slot

OEM Part #:

19-00154-01

EESI Part #:

2300-00462

Description:

Heater Block With Slot

OEM Part #:

19-00155-00

EESI Part #:

2300-00463

Description:

Heater Block  Without Slot

OEM Part #:

19-00155-01

EESI Part #:

2300-00136

Description:

Heater Block 150mm

OEM Part #:

19-00155-01

EESI Part #:

2300-00318

Description:

Heater Block 150mm

OEM Part #:

19-00155-01

EESI Part #:

2300-00464

Description:

Heater Block  With Slot

OEM Part #:

19-00266-01

EESI Part #:

2300-00123

Description:

Motor Ext-Direct Replacement

OEM Part #:

19-00267-01

EESI Part #:

2300-00124

Description:

Motor Rot-Direct Replacement

OEM Part #:

19-00268-01

EESI Part #:

2300-00125

Description:

Motor Lift-Direct Replacement

EESI Part #:

2300-00449

Description:

Heater Block 

OEM Part #:

2-343-V75

EESI Part #:

2300-00317

Description:

O-Ring Centering Viton 2-343 75 Duro KF40 326

OEM Part #:

20-00153-00

EESI Part #:

2300-00084

Description:

Ball, Heater Support, 2.00", Ceramic

OEM Part #:

20-00212-00

EESI Part #:

2300-00085

Description:

Nut, 8-32 UNC-2B, Alum

OEM Part #:

20-00222-00

EESI Part #:

2300-00206

Description:

Washer Heater Block Strap

OEM Part #:

22-00021-01

EESI Part #:

2300-00257

Description:

O-Ring, 1.984 x 0.139, Buna

OEM Part #:

22-00053-00

EESI Part #:

2300-00243

Description:

O-RING, 0.676" X 0.070", VITON

OEM Part #:

22-00118-00

EESI Part #:

2300-00244

Description:

O-RING, 1.234" X 0.139", VITON

OEM Part #:

22-00134-00

EESI Part #:

2300-00245

Description:

O-RING, LL WINDOW, 5.975" X 0.210",

OEM Part #:

22-00136-00

EESI Part #:

2300-00246

Description:

O-RING, LL LEFT PLATE, 15.475" X 0.275,B

OEM Part #:

22-00152-00

EESI Part #:

2300-00247

Description:

O-RING, 4.600" X 0.210", BUNA

OEM Part #:

22-00155-00

EESI Part #:

2300-00314

Description:

O-Ring 2-231 LL Roughing Line to LL Floor

OEM Part #:

22-00174-00

EESI Part #:

2300-00255

Description:

O-Ring, 6.234" x 0.139", Viton

OEM Part #:

22-00176-00

EESI Part #:

2300-00248

Description:

O-RING, 12.975" X 0.139", BUNA

OEM Part #:

22-00179-00

EESI Part #:

2300-00086

Description:

Elbow, Union, 3/8" O-Seal

OEM Part #:

22-00217-00

EESI Part #:

2300-00249

Description:

O-RING, 0.484" X 0.139", VITON

OEM Part #:

22-00234-00

EESI Part #:

2300-00240

Description:

O-RING, 7.48" X 0.139", VITON, 150M

OEM Part #:

22-00235-00

EESI Part #:

2300-00241

Description:

O-RING, 30.12" X 0.275", VITON, 150M

OEM Part #:

22-00236-00

EESI Part #:

2300-00242

Description:

O-RING, 7.45" X 0.275", VITON, 150M

OEM Part #:

22-00239-00

EESI Part #:

2300-00252

Description:

O-RING, 5.984 x 0.139, VITON

OEM Part #:

22-00256-00

EESI Part #:

2300-00256

Description:

O-Ring, 3 1/2" ID x 3 3/4" OD x 1/8" W

OEM Part #:

22-00288-00

EESI Part #:

2300-00193

Description:

T Seal, Viton, Teflon Backing

OEM Part #:

22-00324-00

EESI Part #:

2300-00312

Description:

Seal Lip for Robot EXT

OEM Part #:

22-00326-00

EESI Part #:

2300-00250

Description:

O-RING, 27.18" X 0.275", BUNA

OEM Part #:

22-00333-00

EESI Part #:

2300-00315

Description:

O-Ring 10.81 WTM to LL Floor Inner

OEM Part #:

22-00344-00

EESI Part #:

2300-00258

Description:

O-Ring, 0.364 x 0.070, Viton

OEM Part #:

22-00345-00

EESI Part #:

2300-00253

Description:

O-RING, 0.362 x 0.170, VITON

OEM Part #:

22-00391-00

EESI Part #:

2300-00259

Description:

O-Ring, 0.864 x 0.070, Viton

OEM Part #:

22-00434-00

EESI Part #:

2300-00316

Description:

O-Ring 010 1/4" VCO Seal

OEM Part #:

22-00630-00

EESI Part #:

2300-00271

Description:

O-Ring Kit Gate Valve

OEM Part #:

22-00657-00

EESI Part #:

2300-00251

Description:

O-RING, 7.975" X 0.210", KALREZ

OEM Part #:

22-00725-00

EESI Part #:

2300-00254

Description:

O-Ring, Cooling Station

OEM Part #:

22-00744-00

EESI Part #:

2300-00272

Description:

Valve Diaphragm 1/8" VCR Liquid