Tegal Parts

OEM Part #:

19684-2

EESI Part #:

2000-00029

Description:

Washer Spacer .56 OD x .19 ID

OEM Part #:

37-221-001

EESI Part #:

2000-00001

Description:

Upper Electrode

OEM Part #:

37-221-002

EESI Part #:

2000-00030

Description:

Upper Electrode

OEM Part #:

37-221-003

EESI Part #:

2000-00002

Description:

Upper Electrode

OEM Part #:

37-222-002

EESI Part #:

2000-00018

Description:

Cooling Plate

OEM Part #:

39-344-002

EESI Part #:

2000-00013

Description:

Shower Head

OEM Part #:

39-680-003

EESI Part #:

2000-00004

Description:

Electrode Conehead

OEM Part #:

39-733-004

EESI Part #:

2000-00019

Description:

901e Lower Electrode

OEM Part #:

39-735-002

EESI Part #:

2000-00033

Description:

903e Lower Electrode

OEM Part #:

39-735-003

EESI Part #:

2000-00020

Description:

903e Lower Electrode

OEM Part #:

39-735-004

EESI Part #:

2000-00021

Description:

903e Lower Electrode

OEM Part #:

39-741-002

EESI Part #:

2000-00034

Description:

Lower Electrode Anodized

OEM Part #:

39-741-009

EESI Part #:

2000-00022

Description:

903e Lower Electrode

OEM Part #:

39-741-010

EESI Part #:

2000-00023

Description:

903e Lower Electrode

OEM Part #:

39-741-026

EESI Part #:

2000-00024

Description:

903e Lower Electrode

OEM Part #:

39-927-007

EESI Part #:

2000-00025

Description:

903e Lower Electrode

OEM Part #:

39-927-008

EESI Part #:

2000-00026

Description:

903e Lower Electrode

OEM Part #:

39-927-021

EESI Part #:

2000-00037

Description:

903E ELECTRODE LOWER 6  FLAT ANODIZED

OEM Part #:

39-927-022

EESI Part #:

2000-00035

Description:

903e Lower Electrode 6"-Flat-Ano

OEM Part #:

40-140-001

EESI Part #:

2000-00005

Description:

RING INSUL CER

OEM Part #:

40-140-003

EESI Part #:

2000-00006

Description:

RING INSUL CER 99.5

OEM Part #:

40-140-003

EESI Part #:

2000-00031

Description:

Ring Insulator Ceramic

OEM Part #:

40-260-001

EESI Part #:

2000-00027

Description:

Window Sapphire

OEM Part #:

40-395-001

EESI Part #:

2000-00007

Description:

RING, FLAT 6" CERAMIC

OEM Part #:

40-395-001

EESI Part #:

2000-00008

Description:

RING 6" CASTELLATED W/ FLAT CUTAWAY

OEM Part #:

40-395-001

EESI Part #:

2000-00014

OEM Part #:

40-395-002

EESI Part #:

2000-00009

Description:

Ring, Ceramic, 125C, Castellated

OEM Part #:

40-395-003

EESI Part #:

2000-00010

Description:

RING 4" CASTELLATED W/ FLAT CUTAWAY

OEM Part #:

40-516-005

EESI Part #:

2000-00032

Description:

Ring Macor RAD Comp 4' T/16XX

OEM Part #:

40-575-003-C

EESI Part #:

2000-00011

Description:

Ring, Ceramic Nest, Flat Ring

OEM Part #:

40-576-003-C

EESI Part #:

2000-00012

Description:

RING 8" CASTELLATED W/ FLAT CUTAWAY

OEM Part #:

40-788-616

EESI Part #:

2000-00003

Description:

Centering ESC 6" Bonded Genhre

OEM Part #:

40-788-616

EESI Part #:

2000-00015

OEM Part #:

40-822-002

EESI Part #:

2000-00036

Description:

Focus Ring Quartz Tegal

OEM Part #:

40-826-001

EESI Part #:

2000-00028

Description:

Shield Ion Stripper Quartz

OEM Part #:

40-869-002

EESI Part #:

2000-00016

OEM Part #:

80-202-357

EESI Part #:

2000-00017

Description:

O-Ring