TEL Parts

OEM Part #:

027-000186-1

EESI Part #:

2600-00099

Description:

6-279.30-05.70 V75 FKM O-Ring

OEM Part #:

027-003071-1

EESI Part #:

2600-00100

Description:

568-222 8475UP FFKM O-Ring

OEM Part #:

027-100976-1

EESI Part #:

2600-00101

Description:

568-110 V75 FKM O-Ring

OEM Part #:

027-101035-1

EESI Part #:

2600-00102

Description:

568-382 V75 FKM

OEM Part #:

1105-200159

EESI Part #:

2600-00118

Description:

Si Collar Ring

OEM Part #:

1810-221471-24

EESI Part #:

2600-00002

Description:

Showerhead

OEM Part #:

1810-221471-24

EESI Part #:

2600-00015

Description:

Electrode, Si 100%

OEM Part #:

1810-221584-12

EESI Part #:

2600-00014

Description:

Upper Cooling Plate

OEM Part #:

1810-329157-11M

EESI Part #:

2600-00115

Description:

Modified Inner Focus Ring

EESI Part #:

2600-00098

Description:

Rectangle 4.56 x 2.99 x .197 - In Sapphire

OEM Part #:

1D05-200020-11

EESI Part #:

2600-00018

Description:

Shield Depo QU-A-3

OEM Part #:

1D05-200033-11

EESI Part #:

2600-00019

Description:

Support Shield Depo Q-S5

OEM Part #:

1D05-300052-13

EESI Part #:

2600-00104

Description:

Ring Insulator a7 (DRM2)

OEM Part #:

1D05-300148-11,

EESI Part #:

2600-00095

Description:

Ring Insulator B3 (DRAM2)

OEM Part #:

1D05-300161-11

EESI Part #:

2600-00017

Description:

Support Shield Depo Q-S1

OEM Part #:

1D05-300162-11

EESI Part #:

2600-00022

Description:

Focus Ring Quartz

EESI Part #:

2600-00021

Description:

Focus Ring Quartz

OEM Part #:

1D05-300354-11

EESI Part #:

2600-00111

Description:

Ring Insulator A7 LA6-8

OEM Part #:

1D05-300386-11

EESI Part #:

2600-00109

Description:

Ring Insulator A7 LA6-6 (Upper A7)

OEM Part #:

1D05-400022-14

EESI Part #:

2600-00020

Description:

Window Shield Depo

OEM Part #:

1D05-400022-14

EESI Part #:

2600-00027

Description:

Window Shield Depo (DRM 2)

OEM Part #:

1D10-100670-13

EESI Part #:

2600-00008

Description:

Electrode Upper

OEM Part #:

1D10-100854-15

EESI Part #:

2600-00010

Description:

DRM2 Baffle Plate 

OEM Part #:

1D10-100854-15

EESI Part #:

2600-00048

Description:

DRM2 BAFFLE PLATE

OEM Part #:

1D10-101398-11

EESI Part #:

2600-00049

Description:

BAFFLE PLATE

OEM Part #:

1D10-101475-11

EESI Part #:

2600-00005

Description:

Baffle Plate 8"

OEM Part #:

1D10-101475-11.

EESI Part #:

2600-00050

Description:

BAFFLE PLATE

OEM Part #:

1D10-101551-11

EESI Part #:

2600-00004

Description:

Baffle Plate 8"

OEM Part #:

1D10-101551-11

EESI Part #:

2600-00051

Description:

BAFFLE PLATE

OEM Part #:

1D10-102848-13

EESI Part #:

2600-00052

Description:

BAFFLE PLATE Y203

OEM Part #:

1D10-200734-14

EESI Part #:

2600-00053

Description:

COVER BELLOW

OEM Part #:

1D10-201429-15

EESI Part #:

2600-00009

Description:

Electrode Upper

OEM Part #:

1D10-201429-15

EESI Part #:

2600-00055

Description:

UPPER ELECTRODE

OEM Part #:

1D10-201588-12

EESI Part #:

2600-00044

Description:

Upper Electrode W/Monitor

OEM Part #:

1D10-201588-12

EESI Part #:

2600-00056

Description:

UPPER ELECTRODE W/MONITOR

OEM Part #:

1D10-202177-12

EESI Part #:

2600-00045

Description:

Upper Electrode Vespel Insert

OEM Part #:

1D10-202177-12

EESI Part #:

2600-00054

Description:

UPPER ELECTRODE, VESPEL INSERT

OEM Part #:

1D10-202204-12

EESI Part #:

2600-00007

Description:

Electrode Upper Vespel Insert W/Monitor

OEM Part #:

1D10-202204-12

EESI Part #:

2600-00057

Description:

UPPER ELECTRODE, VESPEL INSERT, W/MONITOR

OEM Part #:

1D10-202988-11

EESI Part #:

2600-00006

Description:

DRM2 Cover Bellows 8"

OEM Part #:

1D10-202988-11

EESI Part #:

2600-00058

Description:

DRM2 COVER BELLOW

OEM Part #:

1D10-204338-13

EESI Part #:

2600-00061

Description:

UPPER ELECTRODE Y203

OEM Part #:

1D10-204418-12

EESI Part #:

2600-00059

Description:

BELLOW COVER Y203

OEM Part #:

1D10-204419-12

EESI Part #:

2600-00060

Description:

BELLOW COVER Y203

OEM Part #:

1D10-302057-11

EESI Part #:

2600-00033

Description:

JIG Gap

OEM Part #:

1D10-302209-14

EESI Part #:

2600-00016

Description:

Focus Ring Si

OEM Part #:

1D10-303124-21

EESI Part #:

2600-00011

Description:

DRM2 Shield Depo

OEM Part #:

1D10-303124-21

EESI Part #:

2600-00046

Description:

DRM2 Depo Shield

OEM Part #:

1D10-303124-21

EESI Part #:

2600-00062

Description:

DRM2 DEPO SHIELD

EESI Part #:

2600-00012

Description:

Shield Depo

EESI Part #:

2600-00013

Description:

Shield Depo

OEM Part #:

1D10-309697-11

EESI Part #:

2600-00026

Description:

Window DEP P-1 (Hole)

OEM Part #:

1D10-309697-11

EESI Part #:

2600-00063

Description:

DEPO WINDOW

OEM Part #:

1D10-309946-11

EESI Part #:

2600-00096

Description:

Ring Single Crystal Silicon 106, P Type 1-30 OHM

OEM Part #:

1D10-313470-11

EESI Part #:

2600-00110

Description:

Ring F-8SO-SI-260-4A

OEM Part #:

1D10-315183-15

EESI Part #:

2600-00064

Description:

DEPO SHIELD Y203

OEM Part #:

1D10-401106-12

EESI Part #:

2600-00030

Description:

Plug Thin (DRM 2)

OEM Part #:

1D10-401935-12

EESI Part #:

2600-00029

Description:

Screw Blind A (DRM 2)

OEM Part #:

1D10-402088-11

EESI Part #:

2600-00031

Description:

Plug SR (DRM 2)

OEM Part #:

1D10-403927-11

EESI Part #:

2600-00032

Description:

Plug Thick (DRM 2)

OEM Part #:

1D10-404285-11

EESI Part #:

2600-00028

Description:

Pin Adjust

OEM Part #:

1D10-405256-22

EESI Part #:

2600-00034

Description:

Screw for Upper Quartz Flat (88DD)

OEM Part #:

1D10-405257-11

EESI Part #:

2600-00037

Description:

Washer Kapton A (88DD)

OEM Part #:

1D10-406499-11

EESI Part #:

2600-00025

Description:

Sapphire Window

OEM Part #:

1D10-406499-11

EESI Part #:

2600-00047

Description:

Sapphire Window

OEM Part #:

1D10-406499-11

EESI Part #:

2600-00065

Description:

Window Sapphire

OEM Part #:

1D10-406499-11

EESI Part #:

2600-00097

Description:

Rectangle w / cutouts x 2

OEM Part #:

1D10-406500-11

EESI Part #:

2600-00024

Description:

Pin Window Peelc B-1

OEM Part #:

1D10-406675-11

EESI Part #:

2600-00035

Description:

Vespel plug for Focus Ring  (88DD)

OEM Part #:

1D10-406875-11

EESI Part #:

2600-00036

Description:

Pin Support Q-S1 (88DD)

OEM Part #:

1D10-406876-11

EESI Part #:

2600-00103

Description:

Threaded Pin Support

OEM Part #:

1D10-407114-11

EESI Part #:

2600-00023

Description:

Kapton Sheet Window

OEM Part #:

2L10-354181-11

EESI Part #:

2600-00074

Description:

Gaskets Type TEL 4W/mk

OEM Part #:

2L10-354527-11

EESI Part #:

2600-00075

Description:

Gaskets Type TEL 2W/mk

OEM Part #:

3805-320070-B1

EESI Part #:

2600-00092

Description:

Quartz Injector Straight

OEM Part #:

3805-320072-B1

EESI Part #:

2600-00093

Description:

Quartz Plug

OEM Part #:

3805-420016-B1

EESI Part #:

2600-00094

Description:

Quartz Guide

OEM Part #:

3D05-100010-11

EESI Part #:

2600-00003

Description:

Shower Head Electrode Cover

OEM Part #:

3D10-100280-11

EESI Part #:

2600-00076

Description:

TE-12" Silicon Cathode (H836)

OEM Part #:

3D10-100844-11

EESI Part #:

2600-00039

Description:

Plate, Shield (TE GND FLAT)

OEM Part #:

3D10-100845-11

EESI Part #:

2600-00042

Description:

Shuttle BTM Type Y-AL

OEM Part #:

3D10-101152-13

EESI Part #:

2600-00040

Description:

Plate, Exhaust Y-AL

OEM Part #:

3D10-101190-11

EESI Part #:

2600-00041

Description:

Ring STM Shield Y-AL

OEM Part #:

3D10-101195-11

EESI Part #:

2600-00091

Description:

Depo Shield

OEM Part #:

3D10-200499-11

EESI Part #:

2600-00085

Description:

Telius - 12" Focus Ring

OEM Part #:

3D10-200585-13

EESI Part #:

2600-00090

Description:

Telius - 12" Ring Shield Si

OEM Part #:

3D10-201089-13

EESI Part #:

2600-00084

Description:

Telius - 12" Focus Ring

OEM Part #:

3D10-201235-13

EESI Part #:

2600-00038

Description:

Plate, Cooling C912-240-0.2 (HT)

OEM Part #:

3D10-201348-11

EESI Part #:

2600-00086

Description:

Telius - 12" Focus Ring

OEM Part #:

3D10-201448-11

EESI Part #:

2600-00087

Description:

Telius - 12" Focus Ring

OEM Part #:

3D10-201448-12

EESI Part #:

2600-00088

Description:

Telius - 12" Focus Ring

OEM Part #:

3D10-201448-13

EESI Part #:

2600-00089

Description:

Telius - 12" Focus Ring

OEM Part #:

3D10-201579-11

EESI Part #:

2600-00079

Description:

Shin-Electrode Upper T10-75-C708

OEM Part #:

3D10-201761-11

EESI Part #:

2600-00080

Description:

Shin-Electrode Upper D38 (DM-SE)

OEM Part #:

3D10-201784-11

EESI Part #:

2600-00081

Description:

Shin-Electrode Upper D38 (DM-SE)

OEM Part #:

3D10-202175-11

EESI Part #:

2600-00083

Description:

Shin-CEL Inner (TE-T10-P)

OEM Part #:

3D10-202364-12

EESI Part #:

2600-00082

Description:

Shin-Si CEL Inner (TE-T10-P-Laby)

OEM Part #:

3D10-250316-11

EESI Part #:

2600-00078

Description:

Shin-12" Silicon Cathode Inner (H1283)

OEM Part #:

3D10-250316-21

EESI Part #:

2600-00106

Description:

Cell Inner SH 1.75

OEM Part #:

3D10-250318-11

EESI Part #:

2600-00105

Description:

Ring Focus AS360-298