TEL Parts

OEM Part #:

3D10-302020-11

EESI Part #:

2600-00077

Description:

Vigus- 12" Silicon Cathode (H912)

OEM Part #:

3D10-302734-12

EESI Part #:

2600-00043

Description:

Shield Depo (TE-GLEX45-FLAT)

OEM Part #:

3D10-350067-11

EESI Part #:

2600-00108

Description:

Ring Protection (TE-RP470)

OEM Part #:

3D10-404449-11

EESI Part #:

2600-00073

Description:

Gaskets Type TEL Shin 12"

OEM Part #:

3D10-404449-11

EESI Part #:

2600-00107

Description:

Cell Outer SH-0.2

OEM Part #:

3M10-101633-11

EESI Part #:

2600-00070

Description:

Middle Plate 300mm

OEM Part #:

3M10-101634-11

EESI Part #:

2600-00069

Description:

Low Plate 300mm

OEM Part #:

3M10-150159-12

EESI Part #:

2600-00067

Description:

Showerhead (Low Temp) 300mm

OEM Part #:

3M10-313563-11

EESI Part #:

2600-00071

Description:

Diffuser Tube 300mm

OEM Part #:

3M10-352195-11

EESI Part #:

2600-00068

Description:

Block (Low Temp) 300mm

OEM Part #:

3M10-410298-11

EESI Part #:

2600-00072

Description:

Diffuser Tube 300mm

OEM Part #:

3M87-029068-16

EESI Part #:

2600-00066

Description:

Showerhead (High Temp) 300mm

EESI Part #:

2600-00001

Description:

Ring Focus Silicon

EESI Part #:

2600-00116

Description:

Si Focus Ring

OEM Part #:

HDL99-040302R2

EESI Part #:

2600-00117

Description:

Focus Ring 2 piece Ceramic Inner