Ulvac Parts

OEM Part #:

1014896

EESI Part #:

2100-00001

Description:

Viewport EPD

OEM Part #:

1016689

EESI Part #:

2100-00002

Description:

GDS-Shield

OEM Part #:

1016698

EESI Part #:

2100-00003

Description:

Bottom Ring

OEM Part #:

1018517

EESI Part #:

2100-00004

Description:

Baffle

OEM Part #:

1018518

EESI Part #:

2100-00005

Description:

Top Ring 2 Sections

OEM Part #:

1019020

EESI Part #:

2100-00006

Description:

Top Plate

OEM Part #:

101980/1016738

EESI Part #:

2100-00007

Description:

Bottom Plate

OEM Part #:

2301700

EESI Part #:

2100-00008

Description:

TUBE, CERAMIC

OEM Part #:

2301856

EESI Part #:

2100-00009

Description:

RING, CERAMIC, ASIQ